Nano-CC-UFS
Literaturdatenbank
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Literaturdatenbank
In dieser Datenbank sollen Literatur-Zitate der letzten Jahre (ab 1995) unserer Mitglieder zu nanorelevanten Themen und Problemen erfaßt werden. Gern nehme ich die Ergänzungen unserer Mitglieder in die Liste auf (ralf.jaeckel@iws.fraunhofer.de).
| [ 01
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H. Banzhof, H. Lichte, A. Luft, C.-F. Meyer, H.-J. Scheibe, B. Schultrich, H. Ziegele
" High resolution TEM investigations of nanostructures in hard amorphous carbon films
"
TATF 98, 6th Intern. Sym. On Trends an New Applications of Thin Films, 18.03. -20.03.98, Regensburg
Materials Science Forum , Band 287-288, (1998), 243-246
Quelle:
nano_29_24
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| [ 02
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R. Dietsch, Th. Holz, H. Mai, C.-F. Meyer, R. Scholz, B. Wehner
" High precision large area PLD of X-ray optical multilayers
"
4th International Conference on Laser Ablation / COLA '97, 20.-25.7.97, Monterey, CA
Application Surface Science, Band 127-129, (1998), 451-456
Quelle:
nano_29_24
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| [ 03
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P. Siemroth, Ch. Wenzel, T. Witke, B. Schultrich
" Copper metallization of submicron trenches with pulsed vacuum arc
"
TATF 98, 6th Intern. Sym. On Trends an New Applications of Thin Films, 18.03. -20.03.98, Regensburg
Materials Science Forum, Band 287-288, (1998), 239
Quelle:
nano_29_24
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| [ 04
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T. Witke, P. Siemroth
" High current metal-ion source for activated deposition
"
TATF 98, 6th Intern. Sym. On Trends an New Applications of Thin Films, 18.03. -20.03.98, Regensburg
Materials Science Forum, Band 287-288, (1998), 331
Quelle:
nano_29_24
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| [ 05
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Th. Holz, R. Dietsch, H. Mai, L. Brügemann, S. Hopfe, R. Scholz, R. Krawietz, B. Wehner
" Pulsed laser deposition of laterally graded NI/C multilayers and their application in parallel X-ray optics
"
46th Annual Denver X-ray Conference and X-Top '97 Symposium, 4.-8.8.97, Steamboat springs, CO
Advances in X-Ray Analysis, CD-ROM, Band 41, (1997)
Quelle:
nano_29_24
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| [ 06
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Th. Holz, R. Dietsch, H. Mai, C. - F. Meyer
" Characterization of pulsed laser deposited Ni/C - multilayers with hard and soft X - rays
"
BESSY Jahresbericht, (1997), 431-433
Quelle:
nano_29_24
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| [ 07
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A. John, H. - J. Scheibe, H. Ziegele, S. Oswald
" Characterization of laser-arc deposited multilayer systems by means of AES, factor analysis and XPS
"
Fresenius Journal of Analytical Chemistry, Band 358, (1997), 304-307
Quelle:
nano_29_24
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| [ 08
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J. Kaspar, A. Luft
" REM- und TEM-Untersuchungen der beim Lasermikrobohren in Silizium hervorgerufenen Werkstoffschädigungen.
"
Metallographie-Tagung, 18.-20.09.96, Hamburg
Sonderbände der Praktischen Metallographie, Band 28, (1997), 373-380
Quelle:
nano_29_24
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| [ 09
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J. Kaspar, A. Luft
" Electron microscopic investigation of structural changes in single crystalline silicon induced by short pulse laser drilling
"
Micro Mat'97, 16.-18.04.97, Berlin
Tagungsband, (1997), 539-542
Quelle:
nano_29_24
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| [ 10
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B. Schultrich, P. Siemroth, H.-J. Scheibe
" Aktivierte Hochratebeschichtung
"
mo Metalloberfläche 51, Band 12, (1997), 936-941
Quelle:
nano_29_24
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| [ 11
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B. Schultrich, B. Siemroth, H.-J. Scheibe
" High rate deposition by vacuum arc methods
"
Surface and Coatings Technology 93, (1997), 64-68
Quelle:
nano_29_24
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| [ 12
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Bloss P., DeReggi A.S., Gläsel H.-J., Hartmann E., Hirsch D., Schäfer H.
" Polarization distribution in ceramic-polymer nanocomposites
"
J. Appl. Phys. 86 (1999), 1-7
Quelle:
nano_50_33
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| [ 13
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Gläsel H.-J., Hartmann E., Mehnert R., Hirsch D., Böttcher R., Hormes J.
" Physico-chemical modification effects of nanoparticles in radiation-cured polymeric composites
"
Nucl. Instr. and Meth. B 151 (1999) 200-206
Quelle:
nano_50_33
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| [ 14
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Gläsel H.-J., Hartmann E., Hirsch D., Böttcher R. Klimm C., Michel D., Semmelhack H.-C., Hormes J.
" Preparation of barium titanate ultrafine powders from a monomeric metallo-organic precursor by combined solid-state polymerisation and pyrolysis
"
J. Mater. Sci. 34 (1999) 2319-2323
Quelle:
nano_50_33
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| [ 15
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Böttcher R., Klotzsche G., Michel D., Semmelhack H.-C., Gläsel H.-J., Hartmann E.
" Spectroscopic investigation of BaTiO3 nanopowders
"
Adv. in Sci. and Technol. A13 (1999) 289-292
Quelle:
nano_50_33
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| [ 16
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Geschke D., Leister N., Steffen M., Gläsel H.-J., Hartmann E.
" Pyroelectric measurements on BaTiO3 / polymer composites by using laser intensity modulation method
"
J. Mater. Sci. Lett. 16 (1997) 1943-1947
Quelle:
nano_50_33
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| [ 17
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Böttcher R., Klotzsche G., Michel, Gläsel H.-J., Hartmann E.
" EPR and NMR investigations of nanocrystalline BaTiO3 powders and polymeric composites
"
in: Magnetic Resonance and Related Phenomena, vol. II, eds. D. Ziessow, W. Lubitz and F. Lendzian
(TU Berlin,1998) 1047-1049
Quelle:
nano_50_33
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| [ 18
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K. Trojan, M. Grischke, H. Dimigen
" Network modification of DLC coatings to adjust a defined surface energy
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phys. stat. sol. (a) 145, 1994, S. 575-585.
Quelle:
nano_28_23
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| [ 19
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M. Grischke, K. Bewilogua, K. Trojan, H. Dimigen
" Application-oriented modifications of deposition processes for diamond-like carbon-based coatings
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Surface and Coatings Technology 74-75, 1995, S. 739-745.
Quelle:
nano_28_23
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| [ 20
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A. Hieke, M. Grischke, F. Morgenweck, H. Dimigen
" Variation of the wettability of DLC coatings by network modification using silicon and oxygen
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Diamond and Related Materials 7, 1998, S. 454-458.
Quelle:
nano_28_23
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| [ 21
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H. Kupfer, F. Richter, S. Friedrich, H.-J. Spies
" Deposition and Properties of TiN/C Multilayers for Corrosion Protection of Steel
"
Surf. Coat. Technol. 74-75 (1995) 333-338.
Quelle:
nano_74_57
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| [ 22
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J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter
" Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization and process diagnostics
"
Diamond and Related Materials 5 (1996) 1103-1112.
Quelle:
nano_74_57
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| [ 23
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R. Pintaske, Th. Welzel, N. Kahl, M. Schaller, J. Hahn, F. Richter
" Process Diagnostics during the Deposition of Cubic Boron Nitride
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Surf. Coat. Technol. 90 (1997) 275-284.
Quelle:
nano_74_57
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| [ 24
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Chr. Spaeth, M. Kuehn, U. Kreissig, F. Richter
" Preparation of CNx films by ion beam assisted filtered cathodic arc deposition
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Diam. Rel. Mater. 6 (1997) 626-630.
Quelle:
nano_74_57
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| [ 25
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C. Spaeth, M. Kuehn, F. Richter, U. Falke, M. Hietschold, R. Kilper, U. Kreissig:
" A comparative study of elastic recoil detection alalysis (ERDA), electron energy loss spectroscopy (EELS) and X-ray photoelectron spectroscopy (XPS) for structural analysis of amorphous carbon nitride films
"
Diamond Rel. Mater. 7 (1998) 1727-1733.
Quelle:
nano_74_57
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| [ 26
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F. Richter, G. Flemming, M. Kuehn, S. Peter, H. Wagner
" Characterization of the arc evaporation of a hot boron cathode
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Surface and Coatings Technology 112 (1999) 43-47.
Quelle:
nano_74_57
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| [ 27
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C. Spaeth, M. Kuehn, T. Chudoba, F. Richter
" Mechanical properties of carbon nitride thin films prepared by ion beam assisted filtered cathodic vacuum arc deposition
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Surface and Coatings Technology, 112 (1999) 140-145.
Quelle:
nano_74_57
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| [ 28
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J. Barthelmes, W. Plieth
" SERS investigations on the adsorption of pyridine carboxylic acids on silver-influence of pH and supporting electrolyte
"
Electrochim. Acta 40, 2487-2490 (1995).
Quelle:
nano_80_64
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| [ 29
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W. Plieth, H. Gräfe
" Laserphotoelectrochemical and spectroscopic investigation of passivating oxide films
"
ACH-Models in Chemistry 132 (4), 515-525 (1995).
Quelle:
nano_80_64
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| [ 30
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J. Barthelmes, W. Plieth
" Field dependence of the protonation equilibrium of 2-pyridinecarboxylic acid
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J. Chem. Soc., Faraday Trans., 93, 1321 - 1324, 4221 (1997).
Quelle:
nano_80_64
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| [ 31
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W. Zhang, W. Plieth, G. Koßmehl
" Kinetic study of the bithienyl electropolymerization
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Electrochim. Acta, 42, 1653-1661 (1997).
Quelle:
nano_80_64
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| [ 32
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H.-P. Welzel, G. Koßmehl, G. Engelmann, B. Neumann, U. Wollenberger, F. Scheller, W. Plieth
" Electrochemical polymerization of functionalized thiophene derivatives for the immobilization of proteins
"
Macromol. Symp 126, 283-293 (1997).
Quelle:
nano_80_64
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| [ 33
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W. Plieth, S. Wetzenstein
" Photoetching of III-V semiconductors: basic photoelectrochemical principles
"
in "Semiconductor Micromachining: Fundamental Electrochemistry and Physics", Eds. S. A. Campbell, H.-J. Lewerenz, J. Wiley & Sons Ltd., 1998, S. 93 - 137.
Quelle:
nano_80_64
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| [ 34
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A. Fikus, R. Pelz, E. Kern, W. Plieth
" Morphology of electrochemically prepared polybithiophene film electrodes by scanning electron microscopy with low acceleration voltage
"
Electrochim. Acta 43, 2233-2235 (1998).
Quelle:
nano_80_64
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| [ 35
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W. Plieth, G.S. Wilson and C. Gutierrez de la Fe
" Spectroelectrochemistry: a survey of in situ spectroscopic techniques
"
Pure & Appl.Chem., 70 1395-1414 and 2409-2412, (1998).
Quelle:
nano_80_64
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| [ 36
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A. Fikus, U. Rammelt, W. Plieth
" Characterization of semiconductor properties of polybithiophene film electrodes in contact with aqueous electrolytes. A combination of electrochemical impedance spectroscopy and photocurrentmeasurements
"
Electrochim. Acta 44, 2025-2035 (1999).
Quelle:
nano_80_64
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| [ 37
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G. Sandmann, W. Plieth, G.I. Lacconi, M. López Teijelo
" Ellipsometric characterization of copper deposits
"
Mater. Sci. Forum , 1998, 289-292 (Pt. 1), 465-470 (Pt. 2).
Quelle:
nano_80_64
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| [ 38
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W. Plieth
" In situ Process Control of Electrolytic Metal Deposition
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Z. Phys. Chem., 208, 211-223 (1999).
Quelle:
nano_80_64
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| [ 39
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Wenfang Zhang, P. Schmidt-Zhang, G. Koßmehl, W. Plieth
" Photocurrent and differential capacity measurements on polybithienyl and poly(3-butylthiophene)films
"
J. Solid State Electrochem., 3, 135 - 140 (1999).
Quelle:
nano_80_64
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| [ 40
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W. Plieth, H. Dietz, G. Sandmann, A. Meixner, D. Weber, P. Moyer, G. Schmidt
" Nanocristalline structures of metal deposits studied by locally resolved Raman spectroscopy
"
Electrochim. Acta, 44, 2025-2036 (1999) .
Quelle:
nano_80_64
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| [ 41
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A. Fikus, N. Hebestreit, U. Rammelt, W. Plieth, D. Appelhans, H.J. Adler
" Dünne Filme leitfähiger Polymere für die Sensorik und Mikroelektronik
"
in "Elektrochemische Reaktionstechnik und Synthese", J. Russow, G. Sandstede, R. Staab (Eds.), GDCh-Monograpien, Bd. 14 (1998), S. 409 - 415.
Quelle:
nano_80_64
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| [ 42
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U. Rammelt, S. Bischoff, M.El-Dessouki, R. Schulze, W. Plieth, L. Dunsch
" Semiconducting properties of polypyrrole films in aqueous solutions
"
J. Solid State Electrochem. 3, (1999), im Druck.
Quelle:
nano_80_64
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| [ 43
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W. Plieth, H. Dietz, G. Sandmann, P. Moyer, J. Schmidt, A. Meixner, M. Weber
" Ortsaufgelöste Spektroskopie von mesoskopischen Strukturen auf Elektroden
"
in "Elektrochemische Reaktionstechnik und Synthese", J. Russow, G. Sandstede, R. Staab (Eds.), GDCh-Monographien, Bd. 14 (1998), S. 130 - 139.
Quelle:
nano_80_64
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| [ 44
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A. Fikus, W. Plieth, Dr. Appelhans, D. Ferse, H.-J. Adler, F.-J. Schmidt, B. Adolphi
" Preparation of ultrathin layers of polythiophene covalently bounded to silicon
"
J. Electrochem. Soc., 140, (1999), im Druck.
Quelle:
nano_80_64
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| [ 45
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A. Fikus, W. Plieth, D. Appelhans, H.-J. Adler
" Verfahren zur haftfesten und dichten Metallisierung von chemisch oder galvanisch nicht oder nur schwer plattierbaren Oberflächen sowie Haftvermittler zur Durchführung des Verfahrens.
"
Anmeldung vom 22. 4. 1998 Aktenzeichen 198 15 220.5-45
Quelle:
nano_80_64
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| [ 46
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W.J. Lorenz, W. Plieth
" Electrochemical Nanotechnology; In-situ local probe techniques at electrochemical interfaces.
"
Wiley-VCH, Weinheim etc.. 1998, 324 Seiten.
Quelle:
nano_80_64
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| [ 47
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Braun S., Meyer D., Paufler P.
" Formation Of A Quasicrystalline Al-Ni-Co Structure By Solid State Reaction Of Multilayers Prepared By PLD
"
Acta Cryst. (1999) A55 Supplement, Abstract P13.22.004., Infos unter: http://www.iws.fhg.de/users/iucr99/
Quelle:
nano_29_24
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| [ 48
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Kaufmann C., Baumann J., Gessner T., Raschke T., Rennau M., Zichner N.
" Electrical characterization of reactively sputtered TiN diffusion barrier layers for copper metallization
"
Applied Surface Science 91 (1995), S. 291-294
Quelle:
nano_76a_59a
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| [ 49
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Baumann J., Werner T., Ehrlich A., Rennau M., Kaufmann C., Gessner T.
" TiN diffusion barriers for copper metallization
"
Microelectronic Engineering 37/38 (1997), S. 221-228
Quelle:
nano_76a_59a
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| [ 50
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Baumann J., Markert M., Werner T., Ehrlich A., Rennau M., Kaufmann C., Gessner T.
" W/TiN double layers as barrier system for use in Cu metallization
"
Microelectronic Engineering 37/38 (1997), S. 229-236.
Quelle:
nano_76a_59a
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| [ 51
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Baumann J., Kaufmann C., Rennau M., Werner T., Gessner T.
" Investigation of copper metallization induced failure of diode structures with and without a barrier
"
Microelectronic Engineering 33 (1997), S. 283-291.
Quelle:
nano_76a_59a
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| [ 52
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Baumann J., Kriz J., Gottfried K., Bräuer J., Ehrlich A., Kaufmann C., Gessner T.
" Deposition and properties of sputtered WNx diffusion barriers
"
R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi (Editors):
Advanced Metallization and Interconnection Systems for ULSI Applications in 1997. Proc. of the conference held September 30 - October 2, 1997 in San Diego, California. Materials Research Society.
Quelle:
nano_76a_59a
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| [ 53
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Baumann J., Stavrev M., Rennau M., Raschke T., Schulz S. E., Wenzel C., Kaufmann C., Gessner T.
" Comparison of Ta, Ti and W based diffusion barriers for copper metallization
"
G. Sandhu, H. Koerner, M. Murakami, Y. Yasuda, N. Kobayashi (Editors):
Advanced Metallization Conference in 1998 (AMC 1998). Proc. of the conference held October 6-8, 1998, in Colorado Springs. Materials Research Society.
Quelle:
nano_76a_59a
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| [ 54
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Schulz S.E., Baumann J., Weidner J.-O., Hasse W., Koerner H., Gessner, T.
" Morphology and electromigration lifetime of Copper lines with different barriers
"
Conference Proceedings ULSI XIII "Advanced Metallization and Interconnect Systems for ULSI Applications in 1997", MRS Warrendale, PA, 1998, S. 427-435.
Quelle:
nano_76a_59a
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| [ 55
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Schulz S.E., Bertz A., Leyffer W., Rennau M., Streiter I., Uhlig M., Winkler T., Gessner T.
" Interaction of materials and processes with silicon oxide based aerogel thin films
"
Conference Proceedings ULSI XIV "Advanced Metallization Conference in 1998", MRS Warrendale, PA, 1999, S. 485-490.
Quelle:
nano_76a_59a
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| [ 56
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Winkler T., Schulz S.E., Streiter R., Gessner T.
" Fabrication of SiO2 based nanoporous aerogel thin films for advanced IC metallization
"
Conference Proceedings ULSI XIII "Advanced Metallization and Interconnect Systems for ULSI Applications in 1997", MRS Warrendale, PA, 1998, S. 347-351.
Quelle:
nano_76a_59a
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| [ 57
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Schulz S.E., Bertz A., Streiter R., Uhlig M., Weiss U., Werner T., Winkler T., Gessner T.
" Fluoropolymer and aerogel thin films as low k dielectrics in IC metallization
"
Invited talk presented at the 1998 International Conference on "Solid State Devices and Materials", Hiroshima, Japan, Sept. 7-10 1998; Ext. Abstract Vol. by The Japan Society of Applied Physics, S. 264/265.
Quelle:
nano_76a_59a
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